Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H2SiCl2. In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS·NH3 (i.e. 16:1), usually results in lower stress nitride films. See more Dichlorosilane was originally prepared by Stock and Somieski by the reaction of SiH4 with hydrogen chloride. Dichlorosilane reacts with water vapor to initially give monomeric prosiloxane::SiH2Cl2 + H2O → SiH2O + 2 HCl … See more Most dichlorosilane results as a byproduct of the reaction of HCl with silicon, a reaction intended to give trichlorosilane. Disproportionation of trichlorosilane is the preferred route. See more Su and Schlegal studied the decomposition of dichlorosilane using transition state theory (TST) using calculations at the G2 level. Wittbrodt and Schlegel worked with these calculations and improved them using the QCISD(T) method. The … See more Dichlorosilane is used as a starting material for semiconducting silicon layers found in microelectronics. It is used because it … See more Stock and Somieski completed the hydrolysis of dichlorosilane by putting the solution of H2SiCl2 in benzene in brief contact with a large excess of water. A large-scale hydrolysis was done in a mixed ether/alkane solvent system at 0 °C, which gave a … See more Dichlorosilane must be ultrapurified and concentrated in order to be used for the manufacturing of semiconducting epitaxial silicon layers, which are used for microelectronics. The buildup of the silicon layers produces thick epitaxial layers, which creates a … See more It is a chemically active gas, which will readily hydrolyze and self ignite in air. Dichlorosilane is also very toxic, and preventative measures must be used for any experiment involving the use of the chemical. Safety hazards also includes skin and eye … See more WebDichlorosilane. EC number: 223-888-3 CAS number: 4109-96-0 General information; Classification & Labelling & PBT assessment; Manufacture, use & exposure; Physical & Chemical properties; Environmental fate & pathways; Ecotoxicological information; Toxicological information;

Dichlorosilane SiH2Cl2 - PubChem

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Dichlorosilane - Wikipedia

WebDichlorosilane is a flammable and poisonous gas, with a strong repulsive odor. It is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong … Web4 rows · Dichlorosilane molecular weight. Molar mass of Cl2H2Si = 101.00738 g/mol. Convert grams ... WebTitle Journal or Book Year; Organometallic chemistry. 19. Correlation of silicon-29 and carbon-13 NMR chemical shifts in analogous compounds. Application in attempted … nova clinic bryan tx